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081112s2007 xxk||||| |||||||||||eng d |
| STA |
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|a POSLANO DO SKCR
|b 2023-07-14
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| 020 |
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|a 978-0-470-01893-4
|z 0-470-01893-3
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| 020 |
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|a 978-0-470-72730-0
|q (pbk.)
|z 0-470-72730-6
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|a BOD004
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| 072 |
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7 |
|a 621.38
|x Elektronika
|2 Konspekt
|9 19
|
| 080 |
|
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|a 621.3.049.77
|2 MRF
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| 080 |
|
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|a 655.226.2
|2 MRF
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| 080 |
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|a 621.38
|2 MRF
|
| 100 |
1 |
|
|a Mack, Chris A.
|4 aut
|
| 245 |
1 |
0 |
|a Fundamental principles of optical lithography :
|b the science of microfabrication /
|c Chris Mack
|
| 260 |
|
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|a Chichester, West Sussex ;
|a Hoboken, NJ :
|b Wiley,
|c c2007
|
| 300 |
|
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|a xvii, 515 s. :
|b il.
|
| 650 |
0 |
7 |
|a fotolitografie
|7 ph274670
|2 czenas
|
| 650 |
0 |
7 |
|a integrované obvody
|7 ph114781
|2 czenas
|
| 650 |
0 |
9 |
|a integrated circuits
|2 eczenas
|
| 650 |
0 |
9 |
|a photolithography
|2 eczenas
|
| 650 |
0 |
9 |
|a photolitography
|2 eczenas
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|a POSLANO DO SKCR
|b 2023-07-14
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| 994 |
- |
1 |
|l MUB01
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|1 PRIF
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|3 537.2-MACK
|5 3145343311
|8 20081112
|f 77
|f Dlouhodobá
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|r 20081112
|s kup
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| AVA |
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|a SCI50
|b PRIF
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|d 537.2-MACK
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|t Není k dispozici
|f 1
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|h N
|i 0
|j PRFST
|
