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|a POSLANO DO SKCR
|b 2010-01-21
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| 020 |
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|a 1-56677-329-6
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|a BOD004
|b cze
|d BOD114
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|a 544
|x Fyzikální chemie
|2 Konspekt
|9 10
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| 080 |
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|a 537.311.322
|2 MRF
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2 |
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|a International Symposium on Chemical Mechanical Planarization (CMP) in Integrated Circuit Device Manufacturing
|n (5. :
|d 2002 :
|c Filadelfie, Pensylvánie)
|4 aut
|
| 245 |
1 |
0 |
|a Chemical mechanical planarization V :
|b proceedings of the international symposium /
|c editors S. Seal ... [et al.]
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| 260 |
|
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|a Pennington, N.J. :
|b The electrochemical society,
|c 2002
|
| 300 |
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|a vii, 274 s.
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| 490 |
1 |
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|a Electrochemical society proceedings ;
|v V. 2002-1
|
| 650 |
0 |
7 |
|a polovodiče
|7 ph124272
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|a mikroelektronika
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|a elektrochemie
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|a electrochemistry
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|a sborníky konferencí
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| 655 |
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|a proceedings of conferences
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| 700 |
1 |
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|a Seal, S.
|4 edt
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| 830 |
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|a Electrochemical society proceedings ;
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