Ion implantation in semiconductors : silicon and germanium /

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Bibliographic Details
Main Authors: Mayer, James W., 1930- (Author), Eriksson, Lennart (Author), Davies, John A. (Author)
Format: Book
Language:English
Published: New York : Academic Press, 1970
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Description
Physical Description:xiii, 280 s. : tab., grafy, čb. il., čb. foto