Ionnaja implantacija /

Autor Ryssel, Heiner, Ruge, Ingolf
Vydáno 1983

Ion implantation in semiconductors : proceedings of the II. International conference on Ion implantation in semiconductors, physics and technology, fundamental and applied aspects : May 24-28, 1971, Garmisch-Partenkirchen, Bavaria, Germany /

Vydáno 1971